Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11393705 | Wafer transport assembly with integrated buffers | John Daugherty, David Trussell, Christopher Pena, Richard H. Gould, Klay Kunkel | 2022-07-19 |
| 11227749 | 3D printed plasma arrestor for an electrostatic chuck | — | 2022-01-18 |