Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11488831 | Efficient cleaning and etching of high aspect ratio structures | Mark Kawaguchi, Nathan Musselwhite | 2022-11-01 |
| 11469079 | Ultrahigh selective nitride etch to form FinFET devices | Kwame Eason, Dengliang Yang, Pilyeon Park, Faisal Yaqoob, Joon Hong Park +3 more | 2022-10-11 |
| 11373949 | Interconnect structure having metal layers enclosing a dielectric | Zuopeng He | 2022-06-28 |