Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11293880 | Method and apparatus for beam stabilization and reference correction for EUV inspection | Larissa Juschkin, Konstantin Tsigutkin | 2022-04-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11293880 | Method and apparatus for beam stabilization and reference correction for EUV inspection | Larissa Juschkin, Konstantin Tsigutkin | 2022-04-05 |