Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11499924 | Determining one or more characteristics of light in an optical system | Larissa Juschkin | 2022-11-15 |
| 11293880 | Method and apparatus for beam stabilization and reference correction for EUV inspection | Larissa Juschkin, Debashis De Munshi | 2022-04-05 |