Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11441992 | Method and apparatus for detection of particle size in a fluid | Mehdi Vaez-Iravani, Todd Egan | 2022-09-13 |
| 11442000 | In-situ, real-time detection of particulate defects in a fluid | Mehdi Vaez-Iravani, Sankesha Bhoyar, Rachit Sharma | 2022-09-13 |
| 11417010 | Image based metrology of surface deformations | Mehdi Vaez-Iravani | 2022-08-16 |
| 11366069 | Simultaneous multi-directional laser wafer inspection | Sheng Liu, Ben-ming Benjamin Tsai | 2022-06-21 |
| 11287248 | Method and system for optical three dimensional topography measurement | Maarten J. van der Burgt, Sheng Liu, Andy Hill, Johan De Greeve, Karel Van Gils | 2022-03-29 |
| 11226234 | Spectrum shaping devices and techniques for optical characterization applications | Edward W. Budiarto, Todd Egan | 2022-01-18 |