Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11393675 | Substrate processing apparatus and method of producing semiconductor device | Masayuki Kitamura, Atsuko Sakata | 2022-07-19 |
| 11373865 | Method for manufacturing semiconductor device having a film with layers of different concentrations of elements | Takehiro Kondoh, Junichi Hashimoto, Soichi Yamazaki | 2022-06-28 |
| 11367624 | Manufacturing method of semiconductor device | Junichi Hashimoto, Kaori Narumiya, Kosuke Horibe, Soichi Yamazaki, Kei Watanabe +5 more | 2022-06-21 |