Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11393675 | Substrate processing apparatus and method of producing semiconductor device | Yuya Matsubara, Atsuko Sakata | 2022-07-19 |
| 11355512 | Semiconductor device including a plug connected to a bit line and containing tungsten | Jun Iijima, Masayoshi Tagami, Satoshi Wakatsuki | 2022-06-07 |
| 11282681 | Semiconductor manufacturing apparatus and method of manufacturing semiconductor device | Katsuaki Natori, Hiroshi Toyoda, Takayuki BEPPU | 2022-03-22 |