Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11537056 | Measurement apparatus, lithography apparatus, and method of manufacturing article | Takamitsu Komaki | 2022-12-27 |
| 11422461 | Imprint apparatus and method of manufacturing article | Takamitsu Komaki, Kiyohito Yamamoto | 2022-08-23 |