Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11537056 | Measurement apparatus, lithography apparatus, and method of manufacturing article | Tadao Nakamura | 2022-12-27 |
| 11422461 | Imprint apparatus and method of manufacturing article | Tadao Nakamura, Kiyohito Yamamoto | 2022-08-23 |
| 11372342 | Position measurement apparatus, overlay inspection apparatus, position measurement method, imprint apparatus, and article manufacturing method | Toshiki Iwai, Tomokazu Taki | 2022-06-28 |