Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11302513 | Electron microscope apparatus, inspection system using electron microscope apparatus, and inspection method using electron microscope apparatus | Takahiro Nishihata, Mayuka Osaki, Takuma Yamamoto, Yusuke Iida, Chihiro Ida | 2022-04-12 |