Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11222764 | Charged particle beam device and control method of optical system of charged particle beam device | Kazuya Yamazaki, Yuko Shimizu, Hirofumi Iijima, Takuma Fukumura, Tomohiro Nakamichi | 2022-01-11 |