Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11309161 | Charged particle beam apparatus and adjustment method for charged particle beam apparatus | — | 2022-04-19 |
| 11222764 | Charged particle beam device and control method of optical system of charged particle beam device | Yuko Shimizu, Hirofumi Iijima, Takuma Fukumura, Naoki Hosogi, Tomohiro Nakamichi | 2022-01-11 |