Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476146 | Substrate support assembly with deposited surface features | Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Teng-Fang Kuo | 2022-10-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476146 | Substrate support assembly with deposited surface features | Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Teng-Fang Kuo | 2022-10-18 |