Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11442371 | Substrate processing system and substrate processing method, and device manufacturing method | — | 2022-09-13 |
| 11435672 | Measurement device, lithography system and exposure apparatus, and control method, overlay measurement method and device manufacturing method | — | 2022-09-06 |
| 11385557 | Measurement device, lithography system and exposure apparatus, and device manufacturing method | — | 2022-07-12 |
| 11274919 | Measurement system, substrate processing system, and device manufacturing method | Go ICHINOSE | 2022-03-15 |
| 11276558 | Exposure apparatus and exposure method, lithography method, and device manufacturing method | — | 2022-03-15 |
| 11256175 | Exposure apparatus and exposure method, and device manufacturing method | — | 2022-02-22 |