Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11430684 | Measurement system, substrate processing system, and device manufacturing method | Tomonori Dosho | 2022-08-30 |
| 11289362 | Suction device, carry-in method, carrier system and exposure apparatus, and device manufacturing method | Taisuke Ibe | 2022-03-29 |
| 11274919 | Measurement system, substrate processing system, and device manufacturing method | Yuichi Shibazaki | 2022-03-15 |