Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11505864 | Adjustable fluid inlet assembly for a substrate processing apparatus and method | Vaino Kilpi, Marko PUDAS | 2022-11-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11505864 | Adjustable fluid inlet assembly for a substrate processing apparatus and method | Vaino Kilpi, Marko PUDAS | 2022-11-22 |