Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11264207 | Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal | Hyungjoon Kim, Karl Leeser, Vince Burkhart | 2022-03-01 |
| 11258420 | Mutually induced filters | Aaron W. Logan, Hyungjoon Kim, Yaswanth Rangineni, Karl Leeser | 2022-02-22 |
| 11258421 | Combiner and distributor for adjusting impedances or power across multiple plasma processing stations | George Thomas, Yaswanth Rangineni, Edward Augustyniak | 2022-02-22 |