Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11260498 | Method of polishing a new or a refurbished electrostatic chuck | William M. Lu, Wendell Glen Boyd, Jr. | 2022-03-01 |
| 11260500 | Retaining ring with shaped surface | Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more | 2022-03-01 |