Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11492709 | Method and composition for etching molybdenum | Atanu K. Das, Daniela White, Emanuel I. Cooper, Eric Hong, JeongYeol Yang +5 more | 2022-11-08 |
| 11476158 | Cobalt deposition selectivity on copper and dielectrics | Philip S. H. Chen, William Hunks, Ruben Lieten | 2022-10-18 |
| 11346008 | Ruthenium etching composition and method | Emanuel I. Cooper | 2022-05-31 |