Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11530356 | Compositions and methods for selectively etching silicon nitride films | Steven M. Bilodeau, Emanuel I. Cooper | 2022-12-20 |
| 11492709 | Method and composition for etching molybdenum | Atanu K. Das, Emanuel I. Cooper, Eric Hong, JeongYeol Yang, Juhee Yeo +5 more | 2022-11-08 |
| 11446708 | Compositions and methods for reducing interaction between abrasive particles and a cleaning brush | — | 2022-09-20 |
| 11421157 | Formulations for high selective silicon nitride etch | David Kuiper, Susan DiMeo | 2022-08-23 |
| 11365351 | Wet etching composition and method | Youngmin Kim, Michael White, Emanuel I. Cooper, Steven M. Bilodeau | 2022-06-21 |