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Shu Satoh

AT Axcelis Technologies: 1 patents #3 of 10Top 30%
📍 Byfield, MA: #3 of 4 inventorsTop 75%
🗺 Massachusetts: #4,639 of 13,863 inventorsTop 35%
Overall (2022): #259,331 of 548,613Top 50%
1
Patents 2022

Issued Patents 2022

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11244800 Stepped indirectly heated cathode with improved shielding Wilhelm Platow, Neil J. Bassom, Paul Silverstein, Marvin Farley 2022-02-08