MF

Marvin Farley

AT Axcelis Technologies: 1 patents #3 of 10Top 30%
📍 Ipswich, MA: #12 of 31 inventorsTop 40%
🗺 Massachusetts: #4,639 of 13,863 inventorsTop 35%
Overall (2022): #351,322 of 548,613Top 65%
1
Patents 2022

Issued Patents 2022

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11244800 Stepped indirectly heated cathode with improved shielding Wilhelm Platow, Neil J. Bassom, Shu Satoh, Paul Silverstein 2022-02-08