Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532464 | Reactor design for large-area VHF plasma processing with improved uniformity | Shuran Sheng, Keita KUWAHARA, Chang-Hee Shin, Su Ho Cho | 2022-12-20 |
SA
Shinobu ABE
Overall (2022): #265,000 of 548,613Top 50%
1
Patents 2022