Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532464 | Reactor design for large-area VHF plasma processing with improved uniformity | Shinobu ABE, Keita KUWAHARA, Chang-Hee Shin, Su Ho Cho | 2022-12-20 |
| 11499231 | Lid stack for high frequency processing | Lin Zhang, Joseph C. Werner | 2022-11-15 |
| 11215934 | In-situ light detection methods and apparatus for ultraviolet semiconductor substrate processing | Ralph P. ANTONIO, Lin Zhang, Joseph C. Werner | 2022-01-04 |