Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11499231 | Lid stack for high frequency processing | Shuran Sheng, Lin Zhang | 2022-11-15 |
| 11215934 | In-situ light detection methods and apparatus for ultraviolet semiconductor substrate processing | Ralph P. ANTONIO, Shuran Sheng, Lin Zhang | 2022-01-04 |