PS

Paul Silverstein

AT Axcelis Technologies: 2 patents #1 of 10Top 10%
📍 Somerville, MA: #67 of 587 inventorsTop 15%
🗺 Massachusetts: #2,177 of 13,863 inventorsTop 20%
Overall (2022): #122,586 of 548,613Top 25%
2
Patents 2022

Issued Patents 2022

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
11521821 Ion source repeller Steven T. Drummond, Neil K. Colvin 2022-12-06
11244800 Stepped indirectly heated cathode with improved shielding Wilhelm Platow, Neil J. Bassom, Shu Satoh, Marvin Farley 2022-02-08