Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11225715 | Showerhead, semiconductor manufacturing apparatus including the same, and semiconductor manufacturing method | Byung-Sun Park, Ik Soo Kim, Jiwoon Im, Sangho Rha | 2022-01-18 |