Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11335563 | Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same | Baosuo Zhou, Ardavan Niroomand, Paul A. Morgan, Shuang Meng, Joseph Neil Greeley +1 more | 2022-05-17 |