Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11443963 | Substrate processing method and substrate processing apparatus | Mana TANABE, Kenji Masui, Kaori Umezawa | 2022-09-13 |
| 11275305 | Method for producing photomask, method for producing semiconductor device, method for forming pattern, and photomask | Yukio OPPATA | 2022-03-15 |
| 11249391 | Exposure mask and manufacturing method of same | Takashi Kamo | 2022-02-15 |