Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11443963 | Substrate processing method and substrate processing apparatus | Mana TANABE, Kosuke TAKAI, Kaori Umezawa | 2022-09-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11443963 | Substrate processing method and substrate processing apparatus | Mana TANABE, Kosuke TAKAI, Kaori Umezawa | 2022-09-13 |