Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11361992 | Conformal titanium nitride-based thin films and methods of forming same | Niloy Mukherjee, Hae Young Kim, Jae Seok Heo, Sung Hoon Jung, Somilkumar J. Rathi +4 more | 2022-06-14 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11361992 | Conformal titanium nitride-based thin films and methods of forming same | Niloy Mukherjee, Hae Young Kim, Jae Seok Heo, Sung Hoon Jung, Somilkumar J. Rathi +4 more | 2022-06-14 |