Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11482413 | Conformal and smooth titanium nitride layers and methods of forming the same | Sung Hoon Jung, Niloy Mukherjee, Yoshikazu Okuyama, Nariman Naghibolashrafi, Bunsen B. Nie +1 more | 2022-10-25 |
| 11361992 | Conformal titanium nitride-based thin films and methods of forming same | Niloy Mukherjee, Hae Young Kim, Jerry Mack, Jae Seok Heo, Sung Hoon Jung +4 more | 2022-06-14 |
| 11328944 | Systems and methods of placing substrates in semiconductor manufacturing equipment | Alex Finkelman, Niloy Mukherjee | 2022-05-10 |