SR

Somilkumar J. Rathi

EU Eugenus: 3 patents #2 of 15Top 15%
Overall (2022): #61,705 of 548,613Top 15%
3
Patents 2022

Issued Patents 2022

Patent #TitleCo-InventorsDate
11482413 Conformal and smooth titanium nitride layers and methods of forming the same Sung Hoon Jung, Niloy Mukherjee, Yoshikazu Okuyama, Nariman Naghibolashrafi, Bunsen B. Nie +1 more 2022-10-25
11361992 Conformal titanium nitride-based thin films and methods of forming same Niloy Mukherjee, Hae Young Kim, Jerry Mack, Jae Seok Heo, Sung Hoon Jung +4 more 2022-06-14
11328944 Systems and methods of placing substrates in semiconductor manufacturing equipment Alex Finkelman, Niloy Mukherjee 2022-05-10