Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515179 | Semiconductor processing chamber multistage mixing apparatus | Mehmet Tugrul Samir | 2022-11-29 |
| 11417534 | Selective material removal | Ming Xia, Ching-Mei Hsu | 2022-08-16 |
| 11361939 | Semiconductor processing chamber for multiple precursor flow | Mehmet Tugrul Samir, Dmitry Lubomirsky, Peter M. Hillman, Soonam Park, Martin Yue Choy +1 more | 2022-06-14 |
| 11276559 | Semiconductor processing chamber for multiple precursor flow | Mehmet Tugrul Samir, Dmitry Lubomirsky, Peter M. Hillman, Soonam Park, Martin Yue Choy +1 more | 2022-03-15 |
| 11276590 | Multi-zone semiconductor substrate supports | Mehmet Tugrul Samir, Dmitry Lubomirsky, Peter M. Hillman, Soonam Park, Martin Yue Choy +1 more | 2022-03-15 |