Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11361939 | Semiconductor processing chamber for multiple precursor flow | Mehmet Tugrul Samir, Dongqing Yang, Dmitry Lubomirsky, Peter M. Hillman, Soonam Park +1 more | 2022-06-14 |
| 11276559 | Semiconductor processing chamber for multiple precursor flow | Mehmet Tugrul Samir, Dongqing Yang, Dmitry Lubomirsky, Peter M. Hillman, Soonam Park +1 more | 2022-03-15 |
| 11276590 | Multi-zone semiconductor substrate supports | Mehmet Tugrul Samir, Dongqing Yang, Dmitry Lubomirsky, Peter M. Hillman, Soonam Park +1 more | 2022-03-15 |