Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11526087 | Method of manufacturing a semiconductor device | Jeongjin Lee, Seungyoon Lee | 2022-12-13 |
| 11422455 | EUV exposure apparatus, and overlay correction method and semiconductor device fabricating method using the same | Seungyoon Lee, Jeongjin Lee, Chan Hwang | 2022-08-23 |