Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11537042 | Overlay correcting method, and photolithography method, semiconductor device manufacturing method and scanner system based on the overlay correcting method | Minseok Kang, Seungyoon Lee, Chan Hwang | 2022-12-27 |
| 11526087 | Method of manufacturing a semiconductor device | Doogyu Lee, Seungyoon Lee | 2022-12-13 |
| 11456222 | Overlay correction method and semiconductor fabrication method including the same | Woo Yong Jung, Jinsun KIM, Seungyoon Lee, Chan Hwang | 2022-09-27 |
| 11422455 | EUV exposure apparatus, and overlay correction method and semiconductor device fabricating method using the same | Doogyu Lee, Seungyoon Lee, Chan Hwang | 2022-08-23 |