Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11317798 | Catadioptric unit-magnification afocal pupil relay and optical imaging system employing the same | — | 2022-05-03 |
| 11300884 | Illumination system with curved 1d-patterned mask for use in EUV-exposure tool | Daniel Gene Smith, Donis Flagello, Michael Binnard | 2022-04-12 |