Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11300884 | Illumination system with curved 1d-patterned mask for use in EUV-exposure tool | Daniel Gene Smith, David M. Williamson, Donis Flagello | 2022-04-12 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11300884 | Illumination system with curved 1d-patterned mask for use in EUV-exposure tool | Daniel Gene Smith, David M. Williamson, Donis Flagello | 2022-04-12 |