Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11309202 | Overlay metrology on bonded wafers | Shankar Krishnan, Johannes D. de Veer | 2022-04-19 |
| 11231362 | Multi-environment polarized infrared reflectometer for semiconductor metrology | Guorong V. Zhuang, Shankar Krishnan, Xuefeng Liu, Mengmeng Ye, Dawei Hu | 2022-01-25 |