Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11231362 | Multi-environment polarized infrared reflectometer for semiconductor metrology | Guorong V. Zhuang, Shankar Krishnan, David Y. Wang, Xuefeng Liu, Dawei Hu | 2022-01-25 |