Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11414320 | Methods for producing thin-film layers and microsystems having thin-film layers | Alfred Sigl, Stefan Geissler | 2022-08-16 |
| 11223904 | Method for manufacturing an opening structure and opening structure | — | 2022-01-11 |