Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11524891 | Membrane support for dual backplate transducers | Wolfgang Klein, Evangelos Angelopoulos, Stefan Barzen, Marc Fueldner, Matthias Herrmann +4 more | 2022-12-13 |
| 11414320 | Methods for producing thin-film layers and microsystems having thin-film layers | Alfred Sigl, Wolfgang Friza | 2022-08-16 |