Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11462399 | Sputtering target, oxide semiconductor thin film, and method for producing oxide semiconductor thin film | Kazuaki Ebata, Mami Nishimura | 2022-10-04 |
| 11443943 | Sputtering target, oxide semiconductor thin film, and method for producing these | Kazuaki Ebata | 2022-09-13 |