Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11462399 | Sputtering target, oxide semiconductor thin film, and method for producing oxide semiconductor thin film | Kazuaki Ebata, Nozomi TAJIMA | 2022-10-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11462399 | Sputtering target, oxide semiconductor thin film, and method for producing oxide semiconductor thin film | Kazuaki Ebata, Nozomi TAJIMA | 2022-10-04 |