Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495433 | Charged particle beam apparatus, multi-beamlet assembly, and method of inspecting a specimen | Benjamin John Cook, Dieter Winkler, Markus Thomann, Thomas Kemen | 2022-11-08 |