Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11501946 | Method of influencing a charged particle beam, multipole device, and charged particle beam apparatus | Bernd Woellert, Dieter Winkler | 2022-11-15 |
| 11495433 | Charged particle beam apparatus, multi-beamlet assembly, and method of inspecting a specimen | Dieter Winkler, Markus Thomann, Thomas Kemen, Roman Barday | 2022-11-08 |