Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11367617 | Graded hardmask interlayer for enhanced extreme ultraviolet performance | Ekmini Anuja De Silva, Dario L. Goldfarb | 2022-06-21 |
| 11307496 | Metal brush layer for EUV patterning | Ekmini Anuja De Silva, Jing Guo, Dario L. Goldfarb | 2022-04-19 |