Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11317501 | Method of purifying target material for an EUV light source | Georgiy O. Vaschenko, Peter Michael Baumgart, Chirag Rajyaguru, Benjamin Andrew Sams, Armin Bernhard Ridinger | 2022-04-26 |