Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11448967 | Target formation apparatus | — | 2022-09-20 |
| 11317501 | Method of purifying target material for an EUV light source | Peter Michael Baumgart, Chirag Rajyaguru, Benjamin Andrew Sams, Armin Bernhard Ridinger, Janine Kardokus | 2022-04-26 |