Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532484 | Plasma processing apparatus and plasma processing method | Taku Iwase, Satoshi Terakura, Hayato Watanabe, Masahito Mori | 2022-12-20 |
| 11355322 | Plasma processing apparatus and plasma processing method | Taku Iwase, Masahito Mori, Kenetsu Yokogawa | 2022-06-07 |
| 11257678 | Plasma processing method | Tomohiro Takamatsu, Hiroyuki Kajifusa | 2022-02-22 |